Ryu, Heon yul; Han, Kwang min; Cho, Byoung jun; Shima, Shohei; Hamada, Satomi; Hiyama, Hirokuni; Kim, Tae gon; Park, Jin goo
ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp.88 - 93PublisherVDE Verlag GmbH