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Browsing by Kim, Tae gonAuthor

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Development of post InGaAs CMP cleaning process for sub 10nm device application Go to Link

Purushothaman, Muthukrishnan; Choi, In chan; Kim, Hyun tae; Teugels, Lieve; Kim, Tae gon; Park, Jin goo

ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp 149 - 154PublisherVDE Verlag GmbH

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Novel method for nano-surface analysis of Cu CMP chemicals by AFM and microfluidic chip system Go to Link

Ryu, Heon yul; Han, Kwang min; Cho, Byoung jun; Shima, Shohei; Hamada, Satomi; Hiyama, Hirokuni; Kim, Tae gon; Park, Jin goo

ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp 88 - 93PublisherVDE Verlag GmbH

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Browsing by Kim, Tae gonAuthor

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