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Effects of carbon on improved resistivity of low temperature chemical vapor deposited HfCN films

Jang,Jae Hyuck; Park,Tae Joo; Kim,Jeong Hwan; Na,Duk L; Park,Woo Young; Kim,Miyoung; Hwang,Cheol Seong

ArticleIssue Date2009CitationJournal of the Electrochemical Society, v.156, pp 0 - 0PublisherElectrochemical Society, Inc.
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