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Browsing by Lee, J.-M.Author

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Metal-insulator transition and interfacial thermal transport in atomic layer deposited Ru nanofilms characterized by ultrafast terahertz spectroscopy Go to Link

Shin, H.J.; Lee, J.-M.; Bae, S.; Kim, Woo-Hee; Sim, Sangwan

ArticleIssue Date2021CitationApplied Surface Science, v.563PublisherElsevier B.V.

Nanoscsale particles removal on am Extreme Ultra-Violet Lithography (EUVL) mask layer by lasershock cleaning

Lee, S.-H.; Lee, S.-H.; Park, J.-G.; Busnaina, A.A.; Lee, J.-M.; Kim, T.-H.; Zhang, G.; Eschbach, F.; Ramamoorthy, A.

ConferenceIssue Date2005Place미국; Los Angeles, CA

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Browsing by Lee, J.-M.Author

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