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Oxidation-State-Dependent Selective Atomic Layer Etching of Metal OxidesGo to Link

Lee, Jeongbin; Noh, Jae-Hong; Kim, Jung-Tae; Lee, Dongjun; Choi, Ji Hyeon; Lee, Jeong-Min; Ahn, Ji-Hoon; Park, Tae Joo; Kim, Woo-Hee

ArticleIssue Date2025CitationACS Applied Materials and Interfaces, v.17, no.26, pp 38608 - 38618PublisherAmerican Chemical Society
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