Han, Kwang min; Cho, Byoung jun; Lee, Jung hwan; Ryu, Heon yul; Shima, Shohei; Hamada, Satomi; Hiyama, Hirokuni; Park, Jin-Goo
ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp.230 - 235PublisherVDE Verlag GmbH