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선택적 증착에 의한 메모리 소자 결함 회복 방법A DEFECT HEALING METHOD BY SELECTIVE DEPOSITION FOR MEMORY DEVICE
- Alternative Title
- A DEFECT HEALING METHOD BY SELECTIVE DEPOSITION FOR MEMORY DEVICE
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- 김우희[김우희]
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)