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Atomic Layer Deposition for Semiconductors
- Authors
- 박태주
- Issue Date
- Aug-2013
- Publisher
- Spinger
- Pages
- 263
- ISBN
- 978-1-4614-8054-9
- Files in This Item
- There are no files associated with this item.
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Related Researcher
- Park, Tae Joo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)