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전기적 바이어스를 보조로 사용하는 원자층 증착(Atomic Layer Deposition, ALD) 방법Atomic layer deposition method using an electrical bias
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- Atomic layer deposition method using an electrical bias
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- 박태주[박태주]
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- Park, Tae Joo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)