Kim, Tae-Gon; Heylen, Nancy; Kim, Soon-Wook; Vandeweyer, Tom; Jo, Ah-Jin; Lee, Ju Suk; Ahn, Byoung-Woon; Cho, Sang-Joon; Park, Sang-Il; Irmer, Bernd, et al.
ArticleIssue Date2017CitationICPT 2017 - International Conference on Planarization/CMP Technology, pp.77 - 82PublisherVDE Verlag GmbH