한국어
LIBRARY
Communities & Collections
Researchers
Titles
Issue Date
Journals
검색
Search
All of ScholarWorks
COLLEGE OF ENGINEERING SCIENCES
MAJOR IN APPLIED MATERIAL & COMPONENTS
2. Conference Papers
Current filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Add filters:
Title
Author
Subject
Date Issued
Type
Language
Journal
Journal Index
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results/Page
5
10
15
20
25
30
35
40
45
50
55
60
65
70
75
80
85
90
95
100
Sort items by
Relevance
Title
Issue Date
In order
Ascending
Descending
Authors/record
All
1
5
10
15
20
25
30
35
40
45
50
Results 1-10 of 21 (Search time: 0.004 seconds).
Pinpoint particle removal for EUV Pellicle Productivity Enhancement
김태곤
Conference
Issue Date
2023
Place
Brugge, Belgium
Effect of etchants and oxidizers on the Molybdenum surfaces during post-CMP cleaning process
김태곤
Conference
Issue Date
2023
Place
Kanazawa, Japan
Effect of Cleaning Chemicals on Defects of PVA Brush during Post-CMP Cleaning
김태곤
Conference
Issue Date
2023
Place
Kanazawa, Japan
Characterization of Wetting Behavior on High Aspect Ratio Multilayer Structure
김태곤
Conference
Issue Date
2022
Place
Vancouver, Canada
Effect of Colloidal Silica and Molybdenum Ions on PVA Brush Loading during Mo Post-CMP Cleaning
김태곤
Conference
Issue Date
2023
Place
Busan, Korea
Characterization of Alkaline Cu/Ti Slurry for TSV Chemical Mechanical Planarization
김태곤
Conference
Issue Date
2023
Place
Busan, Korea
Selective removal of EUV-exposed particles from pellicle
김태곤
Conference
Issue Date
2023
Place
San Jose, USA
Investigation of Surface Chemistry of 4H-SiC during RCA Cleaning Processes
김태곤
Conference
Issue Date
2023
Place
Busan, Korea
An Analysis Method of the Wetting Characteristic of High Aspect Ratio Structure
김태곤
Conference
Issue Date
2021
Sidewall characterization and 3D-AFM applications
김태곤
Conference
Issue Date
2020
1
2
3
next
Discover
Author
KIM, TAE GON
21
Date Issued
2023
14
2022
1
2021
1
2020
5
Type
Conference
21
BROWSE
한국어
Communities & Collections
Researchers
Titles
Journals
LIBRARY