Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
합성곱 장단기기억 신경망을 이용한 웨이퍼 평탄화 공정의 연마율 가상계측 및 공정변수 중요도 정량화
- Authors
- 김병훈
- Issue Date
- 3-Jun-2022
- Place
- 라마다프라자 제주
- Conference Name
- 한국경영과학회/대한산업공학회 2022 춘계공동학술대회
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Byunghoon
- ERICA 공학대학 (DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING)