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Ru electrodeposition and behaviors of additives for advanced technology nodes
- Authors
- 유봉영
- Issue Date
- 29-Jun-2022
- Place
- 미국
- Conference Name
- IITC (International Interconnect Technology Conference)
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Related Researcher
- Yoo, Bong young
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)