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원자층증착법에 의해 증착된 저저항 질화몰리브덴 박막
- Authors
- 안지훈
- Issue Date
- 11-Nov-2022
- Conference Name
- 2022년도 한국표면공학회 추계학술대회
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Related Researcher
- Ahn, Ji Hoon
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)