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Rutile-TiO2 thin films deposited by Atomic Layer Deposition using thin SnO2 seed layer and Sn doping for DRAM capacitor
- Authors
- 안지훈
- Issue Date
- 18-Jan-2023
- Conference Name
- Electonic Materials and Applications 2023
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Related Researcher
- Ahn, Ji Hoon
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)