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Toward Atomic Level Patterning: Area Selective Atomic Layer Deposition
- Authors
- 김우희
- Issue Date
- 29-Apr-2022
- Conference Name
- Fellow/Master Working Group 선택적 증착 기술 그룹 세미나
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)