Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Area-Selective Atomic Layer Deposition Using Vapor Dosing of Short-Chain Alkanethiol Inhibitors on Metal/Dielectric Surfaces,
- Authors
- 김우희
- Issue Date
- 23-Jun-2022
- Place
- 인하대학교 60주년 기념관
- Conference Name
- 2022 한국표면공학회 춘계학술대회
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)