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Atomic Layer Etching of Ruthenium with Sequential Oxidation and Volatilization reactions,
- Authors
- 김우희
- Issue Date
- 9-Nov-2022
- Place
- 휘닉스제주 섭지코지
- Conference Name
- 2022 한국재료학회 추계학술대회
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)