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신규 Hf 전구체를 이용한 고온 ALD HfO2 박막의 불순물 특성 개선
- Authors
- 박태주
- Issue Date
- 23-Jun-2022
- Place
- 인하대학교
- Conference Name
- 2022년도 한국표면공학회 춘계학술대회
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)