Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Effect of skin layer of PVA brush on static and dynamic contact area during post CMP cleaning
- Authors
- 박진구
- Issue Date
- 28-Sep-2022
- Place
- 온라인
- Conference Name
- 2022 International Conference on Planarization/CMP Technology
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)