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Impact of Seed Annealing on the Reliability of Monolithic GaAs/Si p-n Diode Optical Phase Shifters
- Authors
- Tsiara, Artemisia; Kim, Younghyun; Yudistira, Didit; Kunert, Bemardette; Baryshnikova, Marina; Pantouvaki, Marianna; Van Campenhout, Joris; Croes, Kristof
- Issue Date
- Sep-2022
- Publisher
- IEEE
- Citation
- 2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)
- Indexed
- OTHER
- Journal Title
- 2022 EUROPEAN CONFERENCE ON OPTICAL COMMUNICATION (ECOC)
- Abstract
- We report the reliability assessment of carrier-depletion p-n diode GaAs/Si optical modulators monolithically integrated on a 300-mm Si wafer. Dark current remains stable under long accelerating aging tests. Devices without seed annealing experience a shift of Vp. Lp with no stress temperature dependence. (C) 2022 The Author(s)
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Related Researcher
- Kim, Young hyun
- COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY (DEPARTMENT OF PHOTONICS AND NANOELECTRONICS)