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A 2.4 GHz 20 W 8-Channel RF Source Module with Improved Channel Output Balanceopen access

Authors
Nam, HyosungKim, TaewanSim, TaejooBae, SoojiKim, Junghyun
Issue Date
Aug-2021
Publisher
MDPI
Keywords
Channel output balance; GaN HEMT; Multi-channel; Plasma generator; RF; RF source module; SSPA
Citation
Applied Sciences-basel, v.11, no.16, pp 1 - 11
Pages
11
Indexed
SCIE
SCOPUS
Journal Title
Applied Sciences-basel
Volume
11
Number
16
Start Page
1
End Page
11
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/114325
DOI
10.3390/app11167491
ISSN
2076-3417
Abstract
This paper presents a 2.4 GHz 20 W 8-channel radio frequency (RF) source module with improved channel output balance. The proposed RF source module is composed of an RF source generation/DC control part, a power amplification part, and a power dividing part. A 2-stage power amplifier (PA) is combined with gallium nitride high-electron-mobility transistors, including a 25 W transistor and 2-way combined 120 W transistors as the drive and main PA, respectively. In addition, a structure was applied to improve the channel output balance compared to that of the previous module, and the differences of the phase and magnitude of the output power between channels are alleviated within 0.35° and 0.18 dB, respectively. A water jacket was implemented under the drive and main PAs for liquid cooling; however, unlike in the previous work, it was designed by optimizing the size of the water jacket and reducing unnecessary materials using a brazing process. The output power at each channel was 43 dBm, and the drain efficiency was more than 50% at 2.4 GHz. The total module size was 244 mm × 247.4 mm × 30 mm, and its volume was reduced by approximately 58.4% compared to that of the previous module
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KIM, JUNG HYUN
ERICA 공학대학 (SCHOOL OF ELECTRICAL ENGINEERING)
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