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Area-Selective Atomic Layer Deposition Using Aminosilane Precursors to Confer Oxide versus Nitride Selectivity
- Authors
- 김우희
- Issue Date
- 14-Apr-2023
- Conference Name
- 2023 MRS Spring Meeting & Exhibit
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)