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Area-Selective Atomic Layer Deposition of Ruthenium Thin Films by Chemo-Selective Adsorption of Short Alkylating Agents
- Authors
- 김우희
- Issue Date
- 23-May-2023
- Conference Name
- 2023 IEEE International Interconnect Technology Conference (IITC) & IEEE Materials for Advanced Metallization Conference (MAM)
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)