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Area-Selective Atomic Layer Deposition of Ruthenium Thin Films Using Vapor Dosing of Aldehyde Inhibitors on Various Substrates
- Authors
- 김우희
- Issue Date
- 9-Jun-2023
- Conference Name
- Global Conference on Innovation Materials 2023 (GCIM 2023)
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)