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차세대 원자수준 상향식 패터닝 기술:영역 선택적 원자층 증착 공정
- Authors
- 김우희
- Issue Date
- 13-Oct-2023
- Conference Name
- 2023년 한국전기전자재료학회-미래 신산업 기술강좌
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)