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Evaluation and effective removal of organic impurity sources during the synthesis process of roller-type PVA brushes for efficient post-CMP cleaning
- Authors
- 박진구
- Issue Date
- 31-Oct-2023
- Place
- Kanazawa
- Conference Name
- ICPT 2023
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)