Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Advanced Atomic Layer Deposition (ALD): Ultrathin Metal Film Growth Using Discrete Feeding Method and Electric Potential Assisted ALD
- Authors
- 박태주
- Issue Date
- 15-Feb-2023
- Place
- 강원도 하이원리조트
- Conference Name
- 제30회 한국반도체학술대회
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)