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Nucleation behavior and growth characteristics of Atomic-Layer deposited Iridium thin films with TICP and Oxygen
- Authors
- 박태주
- Issue Date
- 22-Jun-2023
- Place
- 강원도 평창 알펜시아리조트
- Conference Name
- 2023 한국전기전자재료학회 하계학술대회
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)