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Effect of Organic Amine on Ceria Contamination for Nitride Surface During STI CMP
- Authors
- 김태곤
- Issue Date
- 20-Nov-2023
- Place
- Busan, Korea
- Conference Name
- Korean International Semiconductor Conference on Manufacturing Technology 2023
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)