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Electrodeposition of stress-relaxation-induced (111)-oriented nanotwin copper film by direct current in additive-free electrolyte

Authors
Han, HaneulSeo, JinmyeongKim, YoujungLee, JinhyunPark, JungjoonYoon, SanghwaYoo, Bongyoung
Issue Date
Jan-2024
Publisher
Pergamon Press Ltd.
Keywords
Nanotwin copper film; Direct current electrodeposition; Stress relaxation; Adatom surface diffusion; Crystallographic orientation
Citation
Electrochimica Acta, v.475, pp 1 - 8
Pages
8
Indexed
SCIE
SCOPUS
Journal Title
Electrochimica Acta
Volume
475
Start Page
1
End Page
8
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/119441
DOI
10.1016/j.electacta.2023.143694
ISSN
0013-4686
1873-3859
Abstract
In this study, we investigated the electrodeposition of stress-induced (111)-oriented nanotwin copper films using direct current in an additive-free electrolyte. We aimed to explore the effects of temperature, current density, and agitation on the formation of nanotwins. At lower temperatures, (111) orientation was induced due to the decrease in adatom surface diffusion. Additionally, higher current densities, which induced high initial residual stress, promoted the formation of (111)-oriented nanotwins, resulting in stress relaxation and a reduction in residual stress. Agitation had a negligible effect on nanotwin formation in our experiments, which were conducted in the additive-free electrolyte. Our findings provide valuable insights into the controlled formation of (111)-oriented nanotwin Cu films and their potential applications in fields requiring Cu films with superior mechanical and electrical properties, which are improved by the formation of nanotwins. By comprehending the fundamental mechanisms involved, it becomes possible to optimize electrodeposition processes for (111)-oriented nanotwin copper films.
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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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