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이중구조센서 트랜스포머 이용한 화학기계적 연마 공정의 재료제거율 예측 및 공정 진단 방법
- Authors
- 김병훈
- Issue Date
- 2-May-2024
- Place
- 여수 엑스포컨벤션 센터
- Conference Name
- 2024년 춘계공동학술대회
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Related Researcher
- Kim, Byunghoon
- ERICA 공학대학 (DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING)