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Optimization for Enhanced Electrical Properties of ZrO2/HfO2 Laminated Structure for Metal-Insulator-Metal Capacitors
- Authors
- 안지훈
- Issue Date
- 25-Jan-2024
- Conference Name
- The 31th Korean Conference in Semiconductors
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Related Researcher
- Ahn, Ji Hoon
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)