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Advanced Atomic Layer Deposition: Metal Oxide Thin Film Growth Using Electric Potential

Authors
박태주
Issue Date
30-Oct-2024
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/121393
Place
여수 디오션리조트
Conference Name
2024 한국표면공학회 추계학술대회 및 특별강습회
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Tae Joo
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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