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Investigation of Wet Etching for Through-Glass Vias (TGVs) Using Ammonium Bifluoride Solutions

Authors
유봉영
Issue Date
25-Nov-2024
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/121462
Place
한국
Conference Name
ENGE 2024
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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