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Effect of pH and Dissolved Oxygen Levels on the Efficiency of Corrosion Inhibitors for Molybdenum during the CMP Process
- Authors
- 박진구
- Issue Date
- 14-Nov-2024
- Place
- 부산
- Conference Name
- KISM 2024
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)