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Investigation of Silica particle and Mo ion contamination on PVA brush during Mo post-CMP cleaning process
- Authors
- 박진구
- Issue Date
- 16-Oct-2024
- Place
- Wiesbaden
- Conference Name
- ICPT 2024
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)