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Differences in Surface Chemical Behavior and Cleaning Mechanism of Si and SiC
- Authors
- 박진구
- Issue Date
- 26-Jan-2024
- Place
- 경주
- Conference Name
- 제 31회 한국반도체학술대회 The 31st Korean Conference on Semiconductors (KCS 2024)
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)