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Changes in Surface Chemical Characteristics of 4H-SiC for Better Cleaning Performance
- Authors
- 김태곤
- Issue Date
- 24-Apr-2024
- Place
- Wild Horse Pass Resort Chandler AZ
- Conference Name
- Surface Preparation and Cleaning Conference
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)