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Study of Chemical-Physical Cleaning Technologies for Better Particle Removal Trapped on the Crystal Defects of 4H-SiC
- Authors
- 김태곤
- Issue Date
- 11-Oct-2024
- Place
- Hawaii Convention Center, Honolulu, HI
- Conference Name
- PRiME 2024
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)