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Investigation of silica particle and Mo ion contamination on PVA brush during Mo post-CMP cleaning process
- Authors
- 김태곤
- Issue Date
- 16-Oct-2024
- Place
- Kurhaus Wiesbaden Germany
- Conference Name
- The 19th International Conference on Planarization/CMP Technology 2024
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Related Researcher
- KIM, TAE GON
- ERICA 공학대학 (MAJOR IN APPLIED MATERIAL & COMPONENTS)