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Thermal Atomic Layer Etching of High-k Oxides via Fluorination and Ligand-Exchange Mechanisms
- Authors
- 김우희
- Issue Date
- 14-Nov-2024
- Conference Name
- KISM 2024
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)