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Enhanced Oxide versus Nitride Selectivity in Area-Selective Atomic Layer Deposition of SiO2 Thin Films Combining Small Molecule Inhibitors with Atomic Layer Etching
- Authors
- 김우희
- Issue Date
- 10-Dec-2024
- Conference Name
- PacSurf 2024
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)