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Area-Selective Atomic Layer Deposition of Al2O3 with Short-Chain Alkanethiol Self-Assembled Monolayers

Authors
김우희
Issue Date
10-Jun-2024
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/121808
Conference Name
GCIM 2024
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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