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Experimental and modeling study of submicron particle removal from deep trenches
- Authors
- Bakhtari, K.; Guldiken, R.O.; Busnaina, A.A.; Park, J.G.
- Issue Date
- Dec-2004
- Conference Name
- 2005 Proceedings - 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005
- Place
- Fremont, CA
- Conference Date
- 2005-02-23 ~ 2005-02-25
- Conference Name
- 10th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2005
- ISSN
- 0000-0000
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Collections - ETC > 2. Conference Papers
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)