Detailed Information

Cited 0 time in webofscience Cited 0 time in scopus
Metadata Downloads

Characterization of incoming PVA brush by an ultrasonication break-in process

Full metadata record
DC Field Value Language
dc.contributor.authorLee, Jung hwan-
dc.contributor.authorPyun, Hae jung-
dc.contributor.authorPurushothaman, Muthukrishnan-
dc.contributor.authorPaluvai, Nagarjuna reddy-
dc.contributor.authorCho, Byoungjun-
dc.contributor.authorHan, Kwang min-
dc.contributor.authorShima, Shohei-
dc.contributor.authorHamada, Satomi-
dc.contributor.authorHiyama, Hirokuni-
dc.contributor.authorPark, Jin-Goo-
dc.date.accessioned2025-04-09T00:33:59Z-
dc.date.available2025-04-09T00:33:59Z-
dc.date.issued2017-00-
dc.identifier.urihttps://scholarworks.bwise.kr/erica/handle/2021.sw.erica/123922-
dc.language영어-
dc.language.isoENG-
dc.titleCharacterization of incoming PVA brush by an ultrasonication break-in process-
dc.typeConference-
dc.citation.titleICPT 2017 - International Conference on Planarization/CMP Technology-
dc.citation.startPage207-
dc.citation.conferenceName2017 International Conference on Planarization/CMP Technology, ICPT 2017-
dc.citation.conferencePlace독일-
dc.citation.conferenceDate2017-10-11 ~ 2017-10-13-
Files in This Item
There are no files associated with this item.
Appears in
Collections
ETC > 2. Conference Papers

qrcode

Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher Park, Jin Goo photo

Park, Jin Goo
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
Read more

Altmetrics

Total Views & Downloads

BROWSE