Characterization of incoming PVA brush by an ultrasonication break-in process
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jung hwan | - |
dc.contributor.author | Pyun, Hae jung | - |
dc.contributor.author | Purushothaman, Muthukrishnan | - |
dc.contributor.author | Paluvai, Nagarjuna reddy | - |
dc.contributor.author | Cho, Byoungjun | - |
dc.contributor.author | Han, Kwang min | - |
dc.contributor.author | Shima, Shohei | - |
dc.contributor.author | Hamada, Satomi | - |
dc.contributor.author | Hiyama, Hirokuni | - |
dc.contributor.author | Park, Jin-Goo | - |
dc.date.accessioned | 2025-04-09T00:33:59Z | - |
dc.date.available | 2025-04-09T00:33:59Z | - |
dc.date.issued | 2017-00 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/123922 | - |
dc.language | 영어 | - |
dc.language.iso | ENG | - |
dc.title | Characterization of incoming PVA brush by an ultrasonication break-in process | - |
dc.type | Conference | - |
dc.citation.title | ICPT 2017 - International Conference on Planarization/CMP Technology | - |
dc.citation.startPage | 207 | - |
dc.citation.conferenceName | 2017 International Conference on Planarization/CMP Technology, ICPT 2017 | - |
dc.citation.conferencePlace | 독일 | - |
dc.citation.conferenceDate | 2017-10-11 ~ 2017-10-13 | - |
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