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Characterization of incoming PVA brush by an ultrasonication break-in process
- Authors
- Lee, Jung hwan; Pyun, Hae jung; Purushothaman, Muthukrishnan; Paluvai, Nagarjuna reddy; Cho, Byoungjun; Han, Kwang min; Shima, Shohei; Hamada, Satomi; Hiyama, Hirokuni; Park, Jin-Goo
- Issue Date
- Dec-2016
- Conference Name
- ICPT 2017 - International Conference on Planarization/CMP Technology
- Place
- 독일
- Conference Date
- 2017-10-11 ~ 2017-10-13
- Conference Name
- 2017 International Conference on Planarization/CMP Technology, ICPT 2017
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- Appears in
Collections - ETC > 2. Conference Papers
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)