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Enhancing Nuclei Density and Grain Refinement in Copper Electrodeposition via Potential Difference Surface Activation of Ruthenium in Sulfuric Acid
- Authors
- 유봉영
- Issue Date
- 1-Apr-2025
- Place
- 한국
- Conference Name
- (사)한국마이크로전자 및 패키징학회 2025년 정기학술대회
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Related Researcher
- Yoo, Bong young
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)