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ALD MoOx using Novel precursor & Mechanisms of initial tetragonal ZrO2 deposition at interfaces through MoO2/MoO3 phase control
- Authors
- 김우희
- Issue Date
- 14-Feb-2025
- Conference Name
- 제 33회 한국반도체학술 대회
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Related Researcher
- Kim, Woo Hee
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)