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Effects of Al Doping Position in Rutile TiO2 Thin Films Deposited via Atomic Layer Deposition

Authors
안지훈
Issue Date
18-Apr-2025
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/125921
Conference Name
2025 한국세라믹학회 춘계학술대회
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Ahn, Ji Hoon
ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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