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Effect of H2/N2 Ratio on Molybdenum Nitride Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
- Authors
- 안지훈
- Issue Date
- 3-Jun-2025
- Conference Name
- The 28th edition of the IEEE International Interconnect Technology Conference (IEEE IITC)
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Related Researcher
- Ahn, Ji Hoon
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)